Furon® UPRM Pressure Regulator - Pneumatic

High Purity Pressure Regulator

Furon UPRM Pneumatic Pressure Regulators from Saint-Gobain are engineered to accurately maintain predetermined output pressures in fluid lines utilizing a pneumatic actuator. Constructed from 100% high-purity PFA and PTFE wetted parts, these pressure regulators are ideal for ultra-pure, harsh or aggressive chemicals commonly used in semiconductor manufacturing. A modified PTFE isolation diaphragm protects the actuator components from the process media, eliminating the possibility of contamination from metal elements.

Features & Benefits

  • Handles fluid temperatures up to 194°F (90°C)
  • All fluoropolymer wetted surfaces
  • Non-metallic external surfaces
  • Integral leak port detection
  • Panel mount feature standard

Specifications

Item # End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type End Stroke Information Flow Factor Cv Pressure Regulation Range Psig (Bar) CAD
UPRM-144-P 1/4 (6.35)
  • FNPT
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-188-P 1/2 (12.7)
  • FNPT
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 3.2 10 - 60 (0.7 - 4.1)
UPRM-744-P 1/4 (6.35)
  • FuseBond™
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-788-P 1/2 (12.7)
  • FuseBond™
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 3.2 10 - 60 (0.7 - 4.1)
UPRM-F44-P 1/4 (6.35)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-F46-P 3/8 (9.525)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-F48-P 1/2 (12.7)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-F812-P 3/4 (19.05)
  • FlareGrip® II
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-F88-P 1/2 (12.7)
  • FlareGrip® II
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 3.2 10 - 60 (0.7 - 4.1)
UPRM-S30044-P 1/4 (6.35)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-S30046-P 3/8 (9.525)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-S30048-P 1/2 (12.7)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-S300812-P 3/4 (19.05)
  • Nippon Pillar Super 300®
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPRM-S30088-P 1/2 (12.7)
  • Nippon Pillar Super 300®
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 3.2 10 - 60 (0.7 - 4.1)

Technical

Max. Liquid Temperature °F (°C) 194 (90)
Max. Inlet Liquid Pressure Psig (Bar) 90 (6.2)
Flow Path 2 Way

Applications

Applications
  • Chemical Distribution Systems
  • Wafer Processing Solutions

Related Documents

Download Selected (0)
Furon UPRM Pressure Regulator - Pneumatic Datasheet

Furon® UPRM Pneumatic Pressure Regulators from Saint-Gobain feature PFA and PTFE wetted parts and feature a PTFE isolation diaphragm.

PDF | 2 pages | 1.01 MB
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High-Purity Fluid Handling Solutions for Microelectronics

Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the

PDF | 32 pages | 12.64 MB
microe-high-purity-fluid-handling-solutions-catalog