Furon® UPRM Pressure Regulator - Pneumatic
High Purity Pressure Regulator
Furon UPRM Pneumatic Pressure Regulators from Saint-Gobain are engineered to accurately maintain predetermined output pressures in fluid lines utilizing a pneumatic actuator. Constructed from 100% high-purity PFA and PTFE wetted parts, these pressure regulators are ideal for ultra-pure, harsh or aggressive chemicals commonly used in semiconductor manufacturing. A modified PTFE isolation diaphragm protects the actuator components from the process media, eliminating the possibility of contamination from metal elements.
Features & Benefits
- Handles fluid temperatures up to 194°F (90°C)
- All fluoropolymer wetted surfaces
- Non-metallic external surfaces
- Integral leak port detection
- Panel mount feature standard
|Max. Liquid Temperature °F (°C)||194 (90)|
|Max. Inlet Liquid Pressure Psig (Bar)||90 (6.2)|
|Flow Path||2 Way|
Furon® UPRM Pneumatic Pressure Regulators from Saint-Gobain feature PFA and PTFE wetted parts and feature a PTFE isolation diaphragm.
Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the