Furon® UPBM Pressure Regulator - Pneumatic

High Purity, Back Pressure Regulator Valves

Furon UPBM Pneumatic Pressure Regulators from Saint-Gobain accurately maintain predetermined input pressures (back pressure) in fluid lines. By adjusting the pilot air pressure, the end-user can control the desired fluid input pressure. A modified PTFE isolation diaphragm protects the actuator components from the process media, assuring no possibility of contamination from metal elements. Constructed from 100% high-purity PFA and PTFE wetted parts, Furon UPBM Pressure Regulators are suitable for use in ultra-pure, harsh, and aggressive chemicals utilized in semiconductor manufacturing. The UPBM regulator is designed for precise delivery of aggressive pure chemicals and DI water applications requiring virtually elimination squealing and chatter at all flow rates.

Features & Benefits

  • Handles fluid temperatures up to 194°F (90°C)
  • All fluoropolymer wetted surfaces
  • Non-metallic external surfaces
  • Integral leak port detection

Specifications

Item # End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type End Stroke Information Pressure Regulation Range Psig (Bar) CAD
UPBM-744-P 1/4 (6.35)
  • FuseBond™
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-788-P 1/2 (12.7)
  • FuseBond™
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-F44-P 1/4 (6.35)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-F46-P 3/8 (9.525)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-F48-P 1/2 (12.7)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-F812-P 3/4 (19.05)
  • FlareGrip® II
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-F88-P 1/2 (12.7)
  • FlareGrip® II
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-S30044-P 1/4 (6.35)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-S30046-P 3/8 (9.525)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-S30048-P 1/2 (12.7)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-S300812-P 3/4 (19.05)
  • Nippon Pillar Super 300®
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)
UPBM-S30088-P 1/2 (12.7)
  • Nippon Pillar Super 300®
1/2" (12.7)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 10 - 60 (0.7 - 4.1)

Technical

Max. Liquid Temperature °F (°C) 194 (90)
Max. Inlet Liquid Pressure Psig (Bar) 90 (6.2)
Flow Path 2 Way

Applications

Applications
  • Chemical Distribution Systems
  • Wafer Processing Solutions

Related Documents

Download Selected (0)
Furon UPBM Pressure Regulator - Pneumatic Datasheet

Furon® UPBM Pneumatic Pressure Regulators from Saint-Gobain accurately maintain predetermined input pressures (back pressure) in fluid lines.

PDF | 2 pages | 826.91 KB
furon-upbm-pressure-regulators-pneumatic
High-Purity Fluid Handling Solutions for Microelectronics

Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the

PDF | 32 pages | 12.64 MB
microe-high-purity-fluid-handling-solutions-catalog