Furon® HPVM Valve - 3 Way Pneumatic
High Purity Compact Valve
Furon HPVM 3 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries or abrasive slurries. Designed to reduce liquid entrapment and shorten clean-up time, these high-purity, high-performance valves feature a compact footprint and a large variety of connection styles. HPVM Valves are ideal for semiconductor processing and applications where space is at a premium.
Specifications
| Item # | CAD | Actuation | End Connection size in (mm) | End Connection Type | Orifice in (mm) | Flow Factor Cv | Liquid Type |
|---|---|---|---|---|---|---|---|
| HPVM3-S30046 | Download CAD |
|
3/8 (9.525) |
|
1/4" (6.35) | 0.7 |
|
| HPVM3-F46 | Download CAD |
|
3/8 (9.525) | 1/4" (6.35) | 0.7 |
|
|
| HPVM3-F44 | Download CAD |
|
1/4 (6.35) |
|
1/4" (6.35) | 0.7 |
|
| HPVM3-F34 |
|
3/16" (4.7625) | 0.7 |
|
|||
| HPVM3-744 |
|
|
1/4" (6.35) | 0.7 |
|
||
| HPV3-144 |
|
|
1/4" (6.35) | 0.7 |
|
Technical
| Max. Liquid Temperature °F (°C) | 203 (95) |
| Max. Inlet Liquid Pressure Psig (Bar) | 80 (5.5) |
| Max. Outlet Liquid Pressure Psig (Bar) | 80 (5) |
| Max. Liquid Back Pressure Psig (Bar) | 80 (5.5) |
| Flow Path | 3 Way |
| Leak Detection Port | Yes |
| Nut Material | PFA |
| Visual Indicator | Yes |
Applications
| Applications |
|
Features & Benefits
- Pressure rated to 80 PSIG (552 kPa)
- Visual position indicator with option for fiber-optic sensor
- Integral mounting base with top or bottom mount standard
- High purity PFA injection molded or PTFE machined body with PTFE diaphragm
- Common port height among all HPVM configurations simplifies installation
- 100% PTFE wetted flow path
- Patented valve design
- Successfully tested for more than 1 million cycles
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