Furon® HPVM Mini Valve - 2-Way Pneumatic

High Purity Valve (1/8" Orifice)

Furon HPVM Mini 2 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries. Designed to reduce liquid entrapment and shorten clean-up time, these high-purity, high-performance valves feature a compact footprint and a large variety of connection styles. HPVM Mini Valves are ideal for applications where space is at a premium.  

Features & Benefits

  • Pressure rated up to 100 PSIG (6.9 bar)
  • True 1/8” orifice valve
  • Visual position indicator with option for optic fiber sensor
  • Lowest internal volume in the industry for a 1/8” valve
  • Optimum Cv 0.06
  • Tested for more than 1 million cycles

Specifications

Item # End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type End Stroke Information Flow Factor Cv CAD
HPVM2-S30022-NC 1/8 (3.175)
  • Nippon Pillar Super 300®
1/8" (3.175)
  • High Purity Water
  • Non High Purity Chemistry
  • Slurry
Pneumatic 0.06
HPVM2-S30022-NO 1/8 (3.175)
  • Nippon Pillar Super 300®
1/8" (3.175)
  • High Purity Water
  • Non High Purity Chemistry
  • Slurry
Pneumatic 0.06

Technical

Max. Liquid Temperature °F (°C) 203 (95)
Max. Inlet Liquid Pressure Psig (Bar) 100 (6.9)
Max. Outlet Liquid Pressure Psig (Bar) 80 (5)
Max. Liquid Back Pressure Psig (Bar) 80 (5.5)
Flow Path 2 Way
Visual Indicator Yes

Applications

Applications
  • Wafer Processing Solutions

Related Documents

Download Selected (0)
Furon HPVM Mini Valve - 2 Way Pneumatic Datasheet

Furon® HPVM Mini 2 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries.

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High-Purity Fluid Handling Solutions for Microelectronics

Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the

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Statement of Performance: Furon® HPVM, 2-Way (Mini) Valve Cycling Test
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Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
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Statement of Performance: Furon® HPVM (Normally Closed) - Reliability in 49% HF
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Statement of Performance: Furon® HPVM Accelerated Life Testing in Slurry
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Statement of Performance: Furon® HPVM Valves Normally Open - Reliability in 49% HF

A summary of a 3rd party reliability test report for Furon HPVM Valves (NO) in 49% hydrofluoric acid (HF).

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Statement of Performance: Furon® HPVM - Reliability in 37% HCl
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