Furon® HPV Mini Valve - 3 Way Pneumatic

High Purity Mini Valve (1/8" Orifice)

Furon HPV Mini 3 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries. Designed to reduce liquid entrapment and shorten clean-up time, these high-performance valves feature a compact footprint and a large variety of connection styles. HPV mini valves are ideal for applications where space is at a premium.

Specifications

Item # CAD Actuation End Connection size in (mm) End Connection Type Orifice in (mm) Flow Factor Cv Liquid Type
HPV3-S30022
  • Pneumatic
1/8 (3.175)
  • Nippon Pillar Super 300®
1/8" (3.175) 0.06
  • High Purity Water
  • High Purity Chemistry
  • Slurry

Technical

Max. Liquid Temperature °F (°C) 203 (95)
Max. Inlet Liquid Pressure Psig (Bar) 100 (6.9)
Max. Outlet Liquid Pressure Psig (Bar) 80 (5.5)
Max. Liquid Back Pressure Psig (Bar) 80 (5.5)
Flow Path 3 Way
Visual Indicator Yes

Applications

Applications
  • Wafer Processing Solutions

Features & Benefits

  • Pressure rated up to 100 PSIG (6.9)
  • True 1/8” orifice valve
  • Lowest internal volume in the industry for a 1/8” valve
  • Optimum Cv
  • Tested for more than 1 million cycles

Related Documents

Download Selected (0)
Furon HPV Mini Valve -  3 Way Pneumatic Datasheet
Datasheet
Furon HPV Mini Valve - 3 Way Pneumatic Datasheet
High-Purity Fluid Handling Solutions for Microelectronics
Brochure
High-Purity Fluid Handling Solutions for Microelectronics
Case Study: Furon HPV Valve - High Temperature
Case Study
Case Study: Furon HPV Valve - High Temperature
Statement of Performance: Furon® HPV, 3-Way (Mini) Valve Cycling Test
Statement of Performance
Statement of Performance: Furon® HPV, 3-Way (Mini) Valve Cycling Test
Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
Statement of Performance
Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
Get in touch