Furon® HPV Mini Valve - 3 Way Pneumatic

High Purity Mini Valve (1/8" Orifice)

Furon HPV Mini 3 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries. Designed to reduce liquid entrapment and shorten clean-up time, these high-performance valves feature a compact footprint and a large variety of connection styles. HPV mini valves are ideal for applications where space is at a premium.

Specifications

Item # Actuation End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type Flow Factor Cv CAD
HPV3-S30022
  • Pneumatic
1/8 (3.175)
  • Nippon Pillar Super 300®
1/8" (3.175)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
0.06

Technical

Max. Liquid Temperature °F (°C) 203 (95)
Max. Inlet Liquid Pressure Psig (Bar) 100 (6.9)
Max. Outlet Liquid Pressure Psig (Bar) 80 (5.5)
Max. Liquid Back Pressure Psig (Bar) 80 (5.5)
Flow Path 3 Way
Visual Indicator Yes

Applications

Applications
  • Wafer Processing Solutions

Features & Benefits

  • Pressure rated up to 100 PSIG (6.9)
  • True 1/8” orifice valve
  • Lowest internal volume in the industry for a 1/8” valve
  • Optimum Cv
  • Tested for more than 1 million cycles

Related Documents

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Furon HPV Mini Valve - 3 Way Pneumatic Datasheet

Furon® HPV Mini 3 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries.

PDF | 2 pages | 1 MB
Furon HPV Mini Valve -  3 Way Pneumatic Datasheet
High-Purity Fluid Handling Solutions for Microelectronics

Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the

PDF | 32 pages | 13.35 MB
High-Purity Fluid Handling Solutions for Microelectronics
Case Study: Furon HPV Valve - High Temperature

Saint-Gobain’s Electronics Application Engineering Team collaborated with a customer to pinpoint a high temperature issue and rapidly solve it utilizing

PDF | 1 page | 186.62 KB
Case Study: Furon HPV Valve - High Temperature
Statement of Performance: Furon® HPV, 3-Way (Mini) Valve Cycling Test
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Statement of Performance: Furon® HPV, 3-Way (Mini) Valve Cycling Test
Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
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Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
Statement of Performance: Furon® HPVM - Reliability in 37% HCl
PDF | 1 page | 498.78 KB
Statement of Performance: Furon® HPVM - Reliability in 37% HCl
Statement of Performance: Furon® HPVM Valves Normally Open - Reliability in 49% HF

A summary of a 3rd party reliability test report for Furon HPVM Valves (NO) in 49% hydrofluoric acid (HF).

PDF | 2 pages | 247.07 KB
Statement of Performance: Furon® HPVM Valves Normally Open - Reliability in 49% HF
Statement of Performance: Furon® HPVM Accelerated Life Testing in Slurry

An accelerated life test was conducted on Furon HPVM valves, which were subjected to 1,500,000 cycles in Cabot Semi-Sperce 12 slurry, by an independent

PDF | 1 page | 340.5 KB
Statement of Performance: Furon® HPVM Accelerated Life Testing in Slurry
Statement of Performance: Furon® HPVM (Normally Closed) - Reliability in 49% HF
PDF | 2 pages | 247.15 KB
Statement of Performance: Furon® HPVM (Normally Closed) - Reliability in 49% HF