hpvm-RV pressure relief valve header

Case Study: Furon® HPVM-RV Pressure Relief Valve

Reliable Solution To Protect Semiconductor Processing Equipment From Upstream Pressure

The Challenge

In today’s semiconductor operations, wafer processing equipment uses more and more components that are calibrated to work with narrow specifications to ensure optimum throughput. Sensitive equipment may easily be affected or even damaged with parameters outside their scope of use, such as pressure and temperature. In order to protect delicate systems, a pressure relief valve is a viable solution that can be installed with your equipment. Despite being passive equipment, it offers protection even in the case of power drop or outage that may prevent other active systems from functioning.

Saint-Gobain Continuously Innovating Solutions

Saint-Gobain has added into its product portfolio the newly redesigned Furon HPVM-RV Pressure Relief Valve (1/4” orifice). The HPVM-RV is designed to limit upstream pressure by opening at a preset value and discharging the media contained from its position. The valve is calibrated at a defined pressure based on a factored setting, but can be adjusted, fine-tuned and locked into a tamper-proof, customized setting in the field through the use of a dual nut locking system to ensure a proper control of the installation.

Customer Experience

The HPVM-RV valve offers a simple but reliable solution to limit pressure spikes in the process line based on a pressure relief valve with a great track record in the semiconductor industry, providing the customer a safer system. The combined safety and flexibility offered by its adjust and lock nut system, make it an ideal component for demanding operations experienced today in the wafer processing equipment.

Furon HPVM RV Pressure Relief Valve Drawing

The A length measurement will vary between part numbers; for example part number HPVM2-F44-RV has an A length measurement of 3.51 inches (89.9 mm) where the HPVM2-S30046-RV is 4.46 inches (113.3 mm). See Datasheet for more details. >>

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Case Study: Furon® HPVM-RV Pressure Relief Valve

The newly redesigned Furon HPVM-RV Pressure Relief Valve limits upstream pressure spikes by opening at a preset value and discharging the media from its

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Case Study: Furon® HPVM-RV Pressure Relief Valve
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