Furon® HPVM Valve - 3 Way Pneumatic

High Purity Compact Valve

Furon HPVM 3 Way Pneumatic Valves from Saint-Gobain offer superior performance and reliability in applications involving aggressive chemistries or abrasive slurries. Designed to reduce liquid entrapment and shorten clean-up time, these high-purity, high-performance valves feature a compact footprint and a large variety of connection styles. HPVM Valves are ideal for semiconductor processing and applications where space is at a premium.

Features & Benefits

  • Pressure rated to 80 PSIG (552 kPa)
  • Visual position indicator with option for fiber-optic sensor
  • Integral mounting base with top or bottom mount standard
  • High purity PFA injection molded or PTFE machined body with PTFE diaphragm
  • Common port height among all HPVM configurations simplifies installation
  • 100% PTFE wetted flow path
  • Patented valve design
  • Successfully tested for more than 1 million cycles

Specifications

Item # End Connection size in (mm) End Connection Type Orifice in (mm) Liquid Type Max. Back Discharge Pressure Psig (bar) End Stroke Information Flow Factor Cv CAD
HPV3-144
  • FNPT
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 0.7
HPVM3-744
  • FuseBond™
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 0.7
HPVM3-F34 3/16" (4.7625)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 0.7
HPVM3-F44 1/4 (6.35)
  • FlareGrip® II
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
80 (5.5) Pneumatic 0.7
HPVM3-F46 3/8 (9.525) 1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
Pneumatic 0.7
HPVM3-S30046 3/8 (9.525)
  • Nippon Pillar Super 300®
1/4" (6.35)
  • High Purity Water
  • High Purity Chemistry
  • Slurry
80 (5.5) Pneumatic 0.7

Technical

Max. Liquid Temperature °F (°C) 203 (95)
Max. Inlet Liquid Pressure Psig (Bar) 80 (5.5)
Max. Outlet Liquid Pressure Psig (Bar) 80 (5)
Max. Liquid Back Pressure Psig (Bar) 80 (5.5)
Flow Path 3 Way
Leak Detection Port Yes
Nut Material PFA
Visual Indicator Yes

Applications

Applications
  • Wafer Processing Solutions

Related Documents

Download Selected (0)
Furon HPVM Valve - 3 Way Pneumatic Datasheet

Furon® HPVM 3 Way Pneumatic Valves from Saint-Gobain are highly reliable in abrasive slurry applications and ideal for semiconductor processing.

PDF | 2 pages | 1.06 MB
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High-Purity Fluid Handling Solutions for Microelectronics

Featuring Furon® products, Saint-Gobain’s newly updated High-Purity Fluid Handing Solutions for Microelectronics catalog that gives an overview of the

PDF | 32 pages | 12.64 MB
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Statement of Performance: Furon® HGVM Valves Reliability in 49%wt Hydrofluoric Acid (HF)
PDF | 2 pages | 151.16 KB
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Statement of Performance: Furon® HPVM (Normally Closed) - Reliability in 49% HF
PDF | 2 pages | 247.15 KB
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Statement of Performance: Furon® HPVM Accelerated Life Testing in Slurry
PDF | 1 page | 340.65 KB
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Statement of Performance: Furon® HPVM Valves Normally Open - Reliability in 49% HF

A summary of a 3rd party reliability test report for Furon HPVM Valves (NO) in 49% hydrofluoric acid (HF).

PDF | 2 pages | 247.07 KB
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Statement of Performance: Furon® HPVM - Reliability in 37% HCl
PDF | 1 page | 498.78 KB
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